A thin film vacuum sensor formed on polyimide substrate for thermal conductivity vacuum gauge.

Modeling a MEMS Thermal Conductivity Pressure Sensor for the Evaluation of Glass Frit Vacuum Packaging

Developing an accurate model for MEMS devices and structures is a great asset for future design optimization and provides insight into experimental results. A thermal conductivity pressure sensor was microfabricated to evaluate the success of a glass frit vacuum packaging scheme. The sensor and the package dimensions present classical size effects that must be included in the model for accuracy...

Cu Thin Film Polyimide Heater for Nerve-Net Tactile Sensor

Tactile sensing is required for assistant robots. A new stacked sensor head was proposed which detects forces and thermal sensations with a nerve-net LSI chip. To measure temperatures and heat flows, the sensor head required a thin and small heater to heat up the sensor head. The features of the polyimide heater are compact, low heat capacity, low power consumption and ease of attaching it to t...

Vacuum Gauge to Vacuum Pump Valve

Wafer-scale Vacuum and Liquid Packaging Concepts for an Optical Thin-film Gas Sensor

This thesis treats the development of packaging and integration methods for the cost-efficient encapsulation and packaging of microelectromechanical (MEMS) devices. The packaging of MEMS devices is often more costly than the device itself, partly because the packaging can be crucial for the performance of the device. For devices which contain liquids or needs to be enclosed in a vacuum, the pac...

Role of vacuum fluctuation forces in thin metal film stability

Thin metal films are subject to the pressure caused by the zero point oscillations of the electromagnetic field, which depends upon the film optical properties and, in case of deposition onto a substrate, upon the substrate reflectivity. It has been suggested that this force may be relevant in determining the stability of deposited pseudomorphic films with respect to buckling or island formatio...